Another important part of this paper is optimal design of a micro - electromechanical systems ( mems ) phased shifter using genetic algorithms ( gas ) 將遺傳算法應(yīng)用于毫米波微電子機(jī)械系統(tǒng)( mems )相移器的設(shè)計(jì)和優(yōu)化是本論文的一個(gè)重要組成部分。
Micro - electromechanical systems ( mems ) are micron - scale sensing and / or actuation devices integrated on a chip . with the development of microelectronic mechanical system , it is found wide application in industries and national defense 隨著微電子機(jī)械系統(tǒng)( microelectronicmechanicalsystem , mems )技術(shù)的興起和發(fā)展, mems器件已大量應(yīng)用于國(guó)防和民用產(chǎn)品。
In this thesis , we focus on dual axis capacitance vibration transducer , which was fabricated by micro - electromechanical systems ( mems ) . the operation mechanism of this kind of accelerometer was analyzed . under external acceleration , the space between sensitive quality mass and detecting electrode will change , which causes the variation of equivalent capacitance 本論文研究了采用微機(jī)械加工技術(shù)( mems )制作的雙軸電容式振動(dòng)傳感器,其基本工作原理是利用慣性質(zhì)量塊在外界加速度的作用下與檢測(cè)電極間的空隙發(fā)生改變,從而引起等效電容的變化來(lái)測(cè)定振動(dòng)加速度的。